Non-Equilibrium Plasma Models
VibrKin reactors are designed for simulating the processes in non-equilibrium plasma (including radiating and chemically active plasma) under the impact of impulse and stationary gas discharges.
The electron energy distribution function (EEDF), on the basis of which the rate constants of the electron stimulating processes in non-equilibrium plasma are calculated, are taken into account in the simulations. In addition, the non-equilibrium vibration distribution function (VDF), as well as the flow of radiation quantum from the plasma, is also considered in the given model.
Gas Phase Models
There is a set of 0D models for modeling of nonequilibrium plasma processes in gas phase taking into account diffusion-control processes charge and excited particles destruction on the walls:
Glow discharge model (light sources)
LCR circuit model (laser systems)
Pulse discharge model (corona discharges, waste treatment)
Heterogeneous Models
There are set of 0D and 1D models which along with nonequilibrium plasma processes taking into account processes of plasma-surface interaction including the impact of exited particles on surface:
Set of 0D models for different discharge types simulations (pulse discharge, glow discharge, arc discharge). These models adressed the problems like plasma layer depositions (PLD), plasma etching, plasma deposition of coatings, pellicle grow, light sources.
1D cylindrical geometry model. This model takes into account radial nonuniformity of species and EEDF. Diffusion of species can be modelled in different approaches including ambipolar diffusion. This model can effectively address the problems involving contragated discharges and discharges in electronegative gases.